| 摘要 |
PURPOSE:To obtain the die for microlens array having varied curvatures at low cost and with good accuracy by forming the plated metallic layer to the projecting shape having a spherical surface with utilizing the surface tension of a molten metal. CONSTITUTION:The resist film 3 having the same diameter with the diameter of the micro lens to be manufactured in an array shape is formed on a metallic plate 1. An insulating film 4 is formed with vacuum evaporation or spattering on the resist film 3 and metallic plate 1. The metallic plate 1 is exposed by peeling the resist film 3 and with removing the insulating film 4 on the resist film 3 together as well. The metal layer 5 of tin, etc. is electroplated on the metallic plate 1. With heating the metallic plate 1 at the temp. higher than the melting point of the metal layer 5 and lower than the melting point of the metal plate 1, the surface of the metal layer 5 is rounded like the projecting part having a spherical shape. The radius of curvature is determined by the cubic volume of the molten metal and the diameter of the metal film. Consequently by controlling the thickness of the metal layer at the plating time the lens die having varied curvature is freely obtd. |
