发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To form the titled device very easily and economically by providing a fine lead having a metal ball at the end thereof on an electrode pad and thereafter separating a ball from the fine lead wire. CONSTITUTION:A metal ball 11 is formed at the end of a metal fine lead 9 with electric dischrge or hydrogen flame, etc. The ball 11 is then connected to an aperture of electrode terminal 4 on a semiconductor element 1 by a connecting means such as the thermal bonding method or ultrasonic wave method. The fine lead 9 is lifted while it is held by a holding plate 12 and the fine lead 9 is cut at the coupling part with the ball 11 by giving gas flow or air flow to pull the fine lead 9. Thereby, a desired bump 8 can be formed.
申请公布号 JPS6142148(A) 申请公布日期 1986.02.28
申请号 JP19840163059 申请日期 1984.08.02
申请人 NEC CORP 发明人 TAKEGAWA KOICHI;BONSHIHARA MANABU
分类号 H01L21/60;H01L21/603 主分类号 H01L21/60
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