| 摘要 |
PURPOSE:To obtain a titled rotor having high performance and high efficiency by accumulating alternately a blade consisting of a material quality of a fine crystal structure and a rotor ring, inserting a deformation preventing jig of high temperature rigidity between the blades, and executing a diffused junction. CONSTITUTION:A blade 1 consisting of a Ti alloy of a fine crystal structure and a rotor ring 2 made of a Ti alloy in the same way are divided and worked, and thereafter, accumulated alternately and fixed by an aligning jig 3. Also, a deformation preventing jig 4 consisting of stainless steel of high-temperature rigidity and provided with a peripheral stepped part 4a is inserted between the blades 1, and in this state, a diffused junction is executed in a vacuum chamber. Therefore, high-temperature creep deformation of the blade is suppressed, high size accuracy is maintained and a joint part of high reliability is obtained. In this way, a desired rotor required for obtaining a turbo-molecular pump having high performance and high efficiency, and improving the corrosion can be manufactured. |
