| 摘要 |
PURPOSE:To improve wear resistance and corrosion resistance by depositing a lubricating agent on a thin ferromagnetic metallic film to form a protective film layer on said layer then subjecting the same to a plasma treatment. CONSTITUTION:The thin ferromagnetic metallic film layer is formed on a substrate, then the lubricating agent of an least >=1 kinds selected from a aliphat. lubricating agent, fluorine contg. fatty acid, fluorine contg. fatty ester, phosphate and silicone lubricating agent is deposited on the thin ferromagnetic metallic film layer to form the protective layer and thereafter the layers are subjected to the plasma treatment by exposing the same into the plasma of an inert gas or gaseous nitrogen or the gaseous mixture composed thereof. If such plasma treatment is executed, the above-mentioned lubricating agents are crosslinked and bonded, by which the protective film layer is made dense and the intrusion of the oxygen and moisture in air into said layer is effectively revented. The coefft. of friction is made thoroughly continuously small, by which the wear resistance is improved and the corrosion resistance is improved as well. |
