| 发明名称 |
METHOD FOR PASSIVATING ALUMINUM-BASED METALLIZATIONS |
| 摘要 |
Aluminium-based alloy films and metallization layers that are patterned by reactive ion etching (RIE) are passivated by etching surface portions of the films or layers with a phosphoric-chromic mixture to remove contaminants and then oxidizing the exposed surface portions in an oxygen atmosphere. |
| 申请公布号 |
DE3268937(D1) |
申请公布日期 |
1986.03.20 |
| 申请号 |
DE19823268937 |
申请日期 |
1982.06.15 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ELDRIDGE, JEROME MICHAEL;LEE, MICHAEL HEIWO;SCHWARTZ, GERALDINE COGIN |
| 分类号 |
C23F4/00;C23C8/10;C23F1/00;C23F1/20;H01L21/302;H01L21/316;(IPC1-7):C23C8/00;C23C14/00;C23F17/00 |
主分类号 |
C23F4/00 |
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