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发明名称
摘要
申请公布号
JPS5223551(B2)
申请公布日期
1977.06.24
申请号
JP19710074297
申请日期
1971.09.23
申请人
发明人
分类号
H05K3/00;C23F1/00;G03C5/00;G03F7/00;G03F7/039;H01L21/027;H01L21/302;H05K3/06;(IPC1-7):01L21/302;03C5/00;05K3/00;03F7/00
主分类号
H05K3/00
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