发明名称 Film forming polymer for projection printing pellicles
摘要 <p>A polymer (I) having repeating units of formula (Ia) x = up to 0.12; y = up to 0.02; z = 0.88 or greater; R = methyl or ethyl; m = 1, 2 or 3; n = 4 - m; G = -(CH2)p-Q; p = 0,1,2,3 or 4; Q = R1, (II), or (III); or, provided p is not zero, Q may also be -OR1 or (IV); R1 = 1-4C alkyl; R2, R4 and R5 = H or R1; and R3 = 1-4C alkylene. A castable soln. of (I) and a pellicle film formed from (I) are also claimed. - Pref. x = 0.09 - 0.12; y = 0.0 - 0.02; m = 3; n = 1; p = 3; Q = (IV); R3 = -(CH2)-; R2 = H; and R = methyl.</p>
申请公布号 ES8602059(A1) 申请公布日期 1986.03.01
申请号 ES20010005317 申请日期 1984.04.17
申请人 J.T. BAKER CHEMICAL COMPANY 发明人
分类号 C08F8/00;C08F8/42;C08J5/18;G03F1/62;H01L21/027;(IPC1-7):C08G77/04;G03F1/00 主分类号 C08F8/00
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