| 摘要 |
<p>PURPOSE:To detect exactly bacteria by adsorbing the reaction product of the bacteria by static electricity on a base plate and scanning a laser beam thereto. CONSTITUTION:A prescribed quantity of ultra-pure water is supplied via a valve 3 from a line 2 for the ultra-pure water to be led to an installation for producing semiconductors. For example, acridine orange, etc. are supplied via a valve 5 from a dye material chamber 4 thereto form the reaction product in a device 1 for supplying measurig water. The product is made into a material which emits fluorescence when irradiated by excitation light. The reaction product and dust are absorbed by the static electricity on the surface of the base plate 7 and remains on the surface of the plate 7 when the measuring water is injected and supplied from the device 1 to the plate 7. The moisture is thus discharged. The fluorescence indicating the presence of the bacteria and the light indicating the presence of the dust are respectively detected by photoelectron multipliers 10, 11 having different photodetecting wavelengths when the excitation light of a laser 9 is irradiated to the plate 7. The detection signals are passed through amplifiers 12, 15 and comparator 13, 16. The number of the times when the light is detected are counted by counters 14, 17 and the numbers of the bacteria and the dust contg. the bacteria are detected.</p> |
