| 摘要 |
PURPOSE:To improve the adhesiveness between a protective film and optical disk recording layer and to extend the life of a recording medium for an optical disk by providing a mixed layer composed of a material constituting the recording layer and a material constituting the protective layer on the surface of the recording layer and forming the protective film while oxidizing thermally the mixed layer. CONSTITUTION:The recording layer 2 consisting of Te or Te alloy, etc. is formed by vacuum deposition to a prescribed film thickness on a substrate 1 which is a glass disk, PMMA disk, etc. The vapor deposition of Si to be formed as the protective film is started from the end period of the formation of such recording layer to form the mixed layer 3 composed of the recording layer consisting of Te and Si on the surface of the recording layer 2. The mixed layer is thereafter thermally oxidized, by which the oxide layer consisting of TeO, TeO2 and SiO, SiO2, etc. is formed on the surface of the layer 2. An SiO2 layer 4 is further formed by an electron beam onto the oxide layer, by which the adhesiveness between the layer 2 and the protective layer (the mixed layer 3 + the SiO2 layer 4) is improved and the internal stress of the protective film is decreased. |
