| 摘要 |
PURPOSE:To drive a moving article on a vibrator in two-dimensional direction by vibrating the vibrator secured at one side by the first, second electrostrictive elements vibrated in perpendicular directions, and the third electrostrictive element vibrated by displacing the phase in the perpendicular direction. CONSTITUTION:Electrostrictive elements 2a, 2b provided on a rising portion 1a of an inverted T-shaped elastic unit 1 are driven by a resonance frequency. Simultaneously, electrostrictive elements 5a, 5b provided at the stationary portion 1b of the unit 1 are driven by the resonance frequency displaced at 90 deg. of phase. Thus, the portion 1a is vibrated in a lateral direction, and the portion 1b is vibrated in a longitudinal direction, and the vibration is displaced at 90 deg.. Accordingly, a movable unit 7 on the unit 1 is driven laterally. When the elements 3a, 3b are driven, the unit 7 is driven in the perpendicular direction, and when the elements 2a-3b are driven, the unit 7 is driven in the direction of 45 deg.. |
