发明名称 |
Method and apparatus for controlling sample temperature |
摘要 |
This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.
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申请公布号 |
US4565601(A) |
申请公布日期 |
1986.01.21 |
申请号 |
US19840675863 |
申请日期 |
1984.11.28 |
申请人 |
HITACHI, LTD. |
发明人 |
KAKEHI, YUTAKA;NAKAZATO, NORIO;FUKUSHIMA, YOSHIMASA;HIRATSUKA, KOUSAI;SHIBATA, FUMIO;YAMAMOTO, NORIAKI;TSUBONE, TSUNEHIKO |
分类号 |
B61D19/02;C23C14/54;G05D23/19;(IPC1-7):B44C1/22;C03C15/00;C03C25/06;C23F1/02 |
主分类号 |
B61D19/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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