| 摘要 |
PURPOSE:To enable discharging impurity rapidly and easily by providing a hollow susceptor made of porous carbon. CONSTITUTION:A manufacturing equipment of semiconductor consists of a reaction chamber 1, an air pipe 2, an exhaust pipe 3, a tube 4', a susceptor 5' and a high frequency heating coil 6. The susceptor 5' is heated by a high frequency radio wave and the heat is conducted to a substrate 7 for heating. The susceptor 5' is made of porous carbon and the inside 5A is hollow. This construction enables discharging a reaction gas rapidly and easily since the susceptor 5' is made of porous carbon even if the reaction gas is absorbed by the susceptor 5'. |
