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发明名称
摘要
申请公布号
JPS60183435(U)
申请公布日期
1985.12.05
申请号
JP19840071173U
申请日期
1984.05.16
申请人
发明人
分类号
C30B19/06;H01L21/208;(IPC1-7):H01L21/208
主分类号
C30B19/06
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