| 摘要 |
PURPOSE:To provide a stable contact which can afford easy fine formation by, after forming a first wire, decomposing a metallic compound in the position of contact with the use of light effective to decompose and separate the metallic compound so as to form a metal projection in the position of the contact. CONSTITUTION:A substrate 1 provided with predetermined elements is applied with light (for Al, lambda=257.2mm.) through a mask in a vacuum container under a pressure of 10<-2>-10<-3>torr while a metallic compound gas [e.g. Al2(CH3)6] is introduced so as to form a wire 2. After that, the mask is substituted and a metal projection 5 is formed under the same conditions. A flat interlayer insulation film 3 is formed to cover them and then the whole surface thereof is etched such that the metal projection 5 in the contact is projected over the interlayer insulation film 3 by 1,000-3,000Angstrom . A second wire 4 is then formed in a similar manner with the first wire so as to cover the projection 5. Thus, a multi-layer wire which is connected with low contact resistance and can be worked finely is be formed with high yield. |
