| 摘要 |
PURPOSE:To reduce the error ratio of a signal and to attain stable surface roughing by performing surface roughing without damaging a signal area on a substrate. CONSTITUTION:A center hole of the substrate 1 is positioned on a center boss 4, the substrate 1 is mounted on a turn table 3 and then a position regulating plate 8 is pressed by a cylinder 13 to fix the substrate 1 on the turn table 3. The pressing force is determined by a position regulating plate pressing force setting spring 12 and the cylinder 13. Then, a driving motor 2 is driven, the turn table 3, the substrate 1 and the position regulating plate 8 are together rotated and surface roughing members 21a, 21b are pressed by a cylinder 19 of a surface roughing member pressing means 20 and pressing force setting springs 15a, 15b under the condition that cut powder is sucked from cut powder suction ports 22a, 22b by actuating a cut powder suction device 23 to rough both the inner and outer peripheries simultaneously. The generated cut powder is sucked from the suction ports 22a, 22b. |
