摘要 |
PURPOSE:To improve controllability of and ensure uniformity in short-circuiting resistance and thereby facilitate the manufacturing elements by a method whereing short- circuiting holes are extensively distributed to position themselves at the crossings in a uniform-density network irrespective of the arrangement of the multiplicity of sectors constituting a three-terminal thyristor equipped with an automatic arc-suppression feature. CONSTITUTION:Between an N type medium resistance region layer 8 and anode electrode 9, a P type low resistance region layer 3 is positioned to constitute a P-N junction with the N type medium resistance region layer 8. N type short-circuiting holes are so distributed that uniformity may be ensured in the size of short-circuiting resistance per unit area between the N type medium resistance region layer 8 and the anode electrode 9. At least the portion in contact with the anode electroe 9 is constituted of an N type resistance region 12 to prevent the contact resistance there from being excessively high. The short-circuiting holes are distributed to be positioned at crossings in a uniform-density network constructed of right triangles, squares, or others. The hole dimensions and the distance D are changed to control the size of short-circuiting resistance per unit area and a higher-density arrangement of short-circuiting regions ensures uniformity in short-circuiting resistance per unit area, all of which contribute to the improvement of element characteristics. |