| 摘要 |
PURPOSE:To achieve a higher analyzing accuracy by having an electron beam scanning the entire sample evenly in a plane crossing it with a deflection coil from an X ray tube which make an electron beam hit an anode target to generate the primary X ray. CONSTITUTION:This apparatus is made up of an X ray bulb 1, a sample fixing device 2 for fixing a sample 3, a collimator 4 adapted to make the secondary X ray radiated from the sample as a parallel flux, a diffracting crystal 5 for spectral analysis of the secondary X ray and an X ray detector 6 adapted to measure the intensity of the secondary X ray at each wavelength corresponding to each element. Four deflection coils 10 adapted to scan an electron beam vertically and horizontally within a fixed area is provided on the circumference of the X ray bulb 1 and controlled with a controller 11. Then, an electron beam is scanned with the deflection coil 10 to irradiate the sample 3 evenly at any position thereby eliminating uneven intensity of X rays. Thus, accurate qualitative and quantitative analysis is possible. |
