| 摘要 |
PURPOSE:To improve the stability of generating concentration, by converting part of generated hydrocarbon gas into CO2, analyzing the CO2 by a CO2 analyzer, and controlling the generating concentration of the hydrocarbon gas based on the analyzed value. CONSTITUTION:A hydrocarbon gas is generated by a hydrocarbon gas generating part 1 and extracted from an extracting pipe 2. Part of the hydrocarbon gas is introduced to an oxidizing catalyst part 6. The hydrocarbon gas is made to undergo oxidizing reaction by the catalyst, and CO2, whose amount is determined by multiplying the number of carbon in the hydrocarbon gas by the concentration, is generated. The concentration of the CO2 is measured by a CO2 analyzer 7. Based on the obtained measured value, a gas concentration control part 3 is operated, and the temperature of a vapor generating part 1a in the gas generating part 1 is changed. Thus the concentration of the generated hydrocarbon gas is controlled as specified. In this way, the concentration of the hydrocarbon gas is controlled as specified simply with good response. |
