| 摘要 |
PURPOSE:To make it possible to prevent the tear up of the edges at trimming by an intermediate layer, by forming the intermediate layer characterized by small difference in thermal expansion coefficients and excellent adhesion with respect to an insulating film and a metallic resistance thin film between both films. CONSTITUTION:On a pattern forming surface 6 of a beam 1, a polyimide resin is coated and an insulating film 7 is formed. An intermediate layer 9 comprising Nichrome silicon is formed thereon. The Nichrome silicon forming the intermediate layer 8 is characterized by the excellent adhesion and the small difference in thermal expansion coefficients with respect to the titanium thin film 9 and the insulating film 7. When the resistance values of strain gage resistor parts 11 and a correcting part 12 are adjusted in this constitution, a laser light beam is projected and the parts are partially cut. Since the intermediate layer characterized by the excellent adhesion and the small difference in the thermal expansion coefficients with respect to the titanium thin film and the insulating film is formed, the tear up of the trimmed edges of the thin films and insulating films can be prevented. |
