| 摘要 |
PURPOSE:To prevent the movement of an axis of easy magnetization after heat treatment by arranging a yoke consisting of a high permeability material on a sample base and giving a revolving magnetic field applied to a thin-film anisotropy. CONSTITUTION:A sample substrate 1 fixed onto a sample base 2 and a thin-film 10 are held in a vacuum chamber 3, and these sample base, substrate and thin- film are turned by a motor 9 through a rotary introducing mechanism 8. Static magnetic fields are applied to the thin-film 10 by fixed iron yokes 6 and exciting coils 5 for the yokes, and the thin-film is heated up to a set temperature by a heater 4, and cooled naturally. Yokes 11a, 11b consisting of a high permeability material are disposed on both sides of the thin-film 10. Consequently, a maximum magnetic field is applied to the thin-film 10 when the yokes 11a, 11b are aligned in the direction 16 of the magnetic field, and a minimum magnetic field is applied when they are aligned in the direction rectangular to the direction 16. Accordingly, the maximum magnetic field can be applied to an axis of easy magnetization, and the movement of said axis can be prevented.
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