| 摘要 |
PURPOSE:To prevent the large fluctuation of surface potential, enable analysis, and improve analysis accuracy by providing a means that generates a magnetic line of force so as to return an electron emitted from an analysis sample to the analysis sample and make the electron parallel to the surface of the analysis sample. CONSTITUTION:By the irradiation of a high output pulse laser beam 2, the surface of an analysis sample 1 suddenly raises its temperature, and is evaporated, then generates plasma. When an ion acceleration electrode 4 is kept in positive potential from the surface of the analysis sample 1 and a negative ion 3 and an electrode 7 in plasma are extracted and accelerated. In this case, since a magnetic line of force 6 is applied to the surface of the analysis sample 1 in parallel, the accelerated electron 7 curves the trajectory and returns to the surface of the analysis sample 1. Since the electron 7 is emitted, the positive charge generated on the surface of the sample is canceled and the fluctuation of the surface potential is suppressed. On the other hand, the negative ion 3 emitted from the analysis sample 1 has exceedingly large mass as compared with the electron 7, it passes through the ion acceleration electrode 4 without being effected by the magnetic line of force 6 and enters a flight time type mass spectrometer 5 and then is analyzed. |
