| 摘要 |
PURPOSE:To perform efficiently joining of metals or ceramics by providing an ultra-high vacuum joining chamber and a preliminary chamber, etc. and maintaining always the inside of the joining chamber under an ultra-high vacuum with cleanliness. CONSTITUTION:A titled joining device consists of means 3 for holding materials 2 to be joined, pressurizing means 4 for bringing the materials 2 into press contact with each other, an ultra-high vacuum joining chamber 1 provided with said means and the above-described means 3, a preliminary chamber 6 for joining under an ultra-high vacuum connected via a sluice valve 7 to said chamber and a means 10 for moving the materials 2 to be joined between the chamber 6 and the chamber 1. The clean joint surface is obtd. by such device and the ultra-high vacuum bonding is efficiently executed.
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