摘要 |
A moulded body is prepared by adding, to powdery silicon grains, a compound that decomposes under heating to produce H2 or hydrocarbon compounds such as CH4 and C2H6 in a temperature region from 500 DEG C to 1200 DEG C. The moulded body is heat treated in an atmosphere of a nitriding gas and/or an inert gas. Subsequently the silicon is chemically converted into silicon nitride in a nitriding gas at a temperature higher than 1200 DEG C. |