| 摘要 |
The invention relates to a sensor having a nozzle arrangement. According to the invention, the nozzle arrangement is provided as a nozzle plate (2) which is provided with a centrally arranged signal channel (8), a plurality of flow ducts (10) which are arranged concentrically with respect to the signal channel (8), and a plurality of pressure feed ducts (12) and an intermediate plate (4) provided with a centrally arranged bore (14) which is arranged between the nozzle plate (2) and the semiconductor pressure sensor (6), and the nozzle plate (2) and the intermediate plate (4) consist in each case of silicon. The outcome of this configuration is that the signal channel length and the dead volume are substantially reduced in conjunction with a diminution of the overall size of the sensor. Moreover, a pneumatic sensor is produced whose response time is, for example, at most approximately 5 msec. <IMAGE>
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