| 摘要 |
PURPOSE:To measure internal stress accurately while simplifying the measuring route by memorizing various data on an object to be measured into a memory means and the number of interference fringes detected to perform an automatic measurement based on the data therefrom. CONSTITUTION:Values of elastic constant, Poisson's ratio, substrate diameter and thickness are inputted into a data input means 11. These data are memorized as intact into a memory means 14 composed of a microcomputer such as RAM. Then, interference fringes are detected with a interference fringe detection means 12 by uniform-thickness interference fringe method. Light reflected from the substrate 1 reaches a camera 24 through a lens 22 and a mirror 23 to take interference fringes. Then, a means 13 of detecting the number of interference fringes detects the number thereof utilizing the existing method enabling the recognition of the image of interference fringes. The data thus obtained are inputted and memorized into the memory means 14. Then, a means 15 of detecting the level of curve detects the level of curve of the substrate based on the data on the number of interference fringes among those outputted data from the memory means 14. |
