| 摘要 |
PURPOSE:To manufacture a piezoelectric vibrator with a high mechanical Q value and small variance by limiting the cut direction and cutting a wafer from the side of sub-orientation flat in parallel with orientation flat. CONSTITUTION:In the manufacture of piezoelectric vibrator, a piezoelectric vibrator wafer 10 is cut from the sub-orientation flat 12 in parallel with the orientation flat 11. In the piezoelectric vibrator cut off from the side of the sub- orientation flat 12 in parallel with the orientation flat 11, the wafer having a value of <=3,000 of the mechanical Q is <=5%, and the piezoelectric vibrator having a higher mechanical Q value generally and small variance is obtained. |
