| 摘要 |
PURPOSE:To obtain a mass spectrum in which a peak due to an unknown specimen and a peak due to a reference specimen are mixed, by changing-over acceleration voltage in a time sharing manner between ion acceleration voltage and specific coefficient multiplied by ion acceleration voltage. CONSTITUTION:When sweep is performed as V(t,M0) as shown by l1 in (b), secondary ions m01, m02, m03... are obtained from a primary ion M0. On the other hand, if acceleration voltage is increased by M1/M0 times and sweep is performed as V(t,M1) as shown by l2 in (b), secondary ions m11, m12, m13... are obtained from a primary ion M1 as shown by (e). If acceleration voltage is mutually changed over between V(t,M0) and V(t,M1) in a time sharing manner during sweep as shown by (c), a secondary ion spectrum, in which secondary ions m01, m02... from the primary ion M0 and secondary ions m11, m12, m13... from the primary ion M1 of a reference specimen are mixed, is obtained. |
