发明名称 METHOD FOR FORMING FILM
摘要 <p>PURPOSE:To obtain a film for filters having a uniform thickness, by spin coating a substrate having a surface consisting of a different material previously with an aqueous solution of a surfactant, and coating the resultant film with a regular solution of a photosensitive material. CONSTITUTION:An aqueous solution of a surfactant in about 0.2-2wt% concentration is uniformly applied to a glass substrate 1 having a light shielding layer 2 partially on the surface thereof by the spin coating method. The degree of hydrophilicity of the glass surface (a) of the glass substrate 1 and the light shielding layer surface (b) is equal. A coating solution of a water-soluble photosensitive material is then applied to the film by the spin coating method, and dried to form a film. Thus, the aimed film for filter layers having a uniform thickness without uneven spectroscopic characteristics is formed by the abovementioned method.</p>
申请公布号 JPS60118652(A) 申请公布日期 1985.06.26
申请号 JP19830226521 申请日期 1983.11.30
申请人 TOPPAN INSATSU KK 发明人 YAMAMOTO KATSUMI;TEZUKA ATSUSHI
分类号 C03C17/38;B05D3/10;C03C17/34;H01L27/14;H01L31/18 主分类号 C03C17/38
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