| 摘要 |
PURPOSE:To decrease heating temp. and to obtain an excellent sensor by coating a mixture composed of metallic alkoxides and metallic acetylacetonate corresponding to the metallic compsn. for forming desired ion sensitive oxide glass on a base material for an ion sensor and subjecting the coating to a heating treatment. CONSTITUTION:A mixture composed of alkoxides acetylacetonate of respective metals so as to form the compsn. corresponding to the inorg. compd. Na2O, SiO2, Al2O3, B2O3, etc. to be used for production of an ion selective glass electrode is dissolved in methanol or the like and the soln. is coated on the insulating film (SiO2 film) 14 on the gate part 13 of, for example, a field effect type transistor element 1 thereby forming uniformly a liquid film. The element is then rested for about 20mis in air to have the moisture in air absorbed in the coating thereby hydrolyzing the metallic alkoxides and acetylacetonate. Such element 1 is subjected to a heating treatment for about 5min at about 450 deg.C in an electric furnace to form a uniform glass sensitive film 2. The transparent and uniform film 2 is thus efficiently formed at the lower temp. than in the case of using only the metallic alkoxide and the sensor having excellent linearity in responsiveness is obtd. |
