发明名称 PRODUCTION OF SUPERCONDUCTIVE THIN FILM OF OXIDE
摘要 PURPOSE:To produce a superconductive thin film of a single cyrstal oxide having excelent electrical properties, by growing an oxide thin film having the same structure as the superconductive oxide on a saphire single crystal substrate, and growing the single crystal thin film of the superconductive oxide on the grown oxide thin film. CONSTITUTION:The thin film of an oxide (SrTiO3, BaTiO3, etc.) having a perowskite crystal structure same as that of a superconductive oxide BaPb1-xBixO3 (0.05<x<0.30) and having a lattice constant close to that of the superconductive oxide, is grown on a saphire single crystal by the epitaxial growth using a high- frequency magnetron sputtering process. The obtained product is used as the new substrate, and a thin film of the superconductive oxide is formed on the composite substrate by the epitaxial growth using a high-frequency magnetron sputtering process.
申请公布号 JPS6096599(A) 申请公布日期 1985.05.30
申请号 JP19830202815 申请日期 1983.10.31
申请人 NIPPON DENSHIN DENWA KOSHA 发明人 HIDAKA YOSHIKAZU;ENOMOTO YOUICHI;INUKAI TAKASHI;MURAKAMI TOSHIAKI
分类号 C30B23/08;C30B23/02;C30B29/22 主分类号 C30B23/08
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