发明名称 HOT-CATHODE ELECTRON IMPACT TYPE ION SOURCE
摘要 PURPOSE:To facilitate the attachment and detachment of an annular hot cathode in a hot-cathode electron impact type ion source for a tetrode analyzer by installing the hot cathode independently of an anode by integrating the hot cathode with electron diaphragm electrodes through an insulating material. CONSTITUTION:After grid-like or mesh-like anode 2 is attached to an anodic base plate 11, an annular hot cathode 3 is installed around the anode 2. At the same time, an electron diaphragm electrode 4 is installed between the anode 2 and the cathode 3, thereby constituting a hot-cathode electron impact type ion source for a tetrode analyzer. Here, after an insulating terminal 6 is attached to an electron diaphragm electrode base plate 5 placed over the anode base plate 11 insulatedly from it, the annular hot cathode 3 is fixed to a terminal vertically extending from the terminal 6. As a result, the hot cathode 3 is installed independently of the anode 2 by integrating the hot cathode 3 with the electron diaphragm electrodes 4 and 5 through the insulating terminal 6. Accordingly, it is possible to facilitate the replacement of the hot cathode 3 by simplifying its attachment and detachment.
申请公布号 JPS6084755(A) 申请公布日期 1985.05.14
申请号 JP19830192113 申请日期 1983.10.14
申请人 SEIKO DENSHI KOGYO KK;WATANABE FUMIO 发明人 WATANABE FUMIO;KOMAKI SHIYOUJIROU;MIYAMOTO MASAO;ITOU TAKAO
分类号 H01J49/14;G01N27/62;G21K1/00;H01J27/02;H01J27/08 主分类号 H01J49/14
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