| 摘要 |
PURPOSE:To improve the flexibility by dissolving the inside face of a pure quartz pipe with hydrofluoric acid solution to make this pipe thin and using a carbon rod for controlling the inside face to reduce the diameter of the pipe so that the inside face is brought into contact with the carbon rod. CONSTITUTION:An original pipe 1 of less bubbles is selected, and its inside face is dissolved with hydrofluoric acid solution to obtain a blank pipe having a desired thickness, and this pipe 2 is cut to an effective length. Connection pipes 2a which are prepared independently and have diameters smaller than that of the blank pipe 2 are melt-connected to both end parts of the blank pipe 2, and the inside faces are washed. Parts of connection pipes 2a are fixed to chucks 4 and 5 of a glas lathe, and an SPC joint is used to connect an air pipe 2b to one connection pipe 2a, and O2 is flowed through this air pipe 2b, and a diluted CF4 or the like is flowed while being heated with a burner on the outside to perform vapor-phase etching, and thereafter, the blank pipe 2 has the diameter extended. A carbon rod 6 is inserted into the blank pipe 2 after this extension, and the carbon rod 6 is pulled out after a collapsing process, thus obtaining a skin pipe 3. |
