| 摘要 |
PURPOSE:To convert the pitches of arrangement of wafers collectively and simply by forming a plurality of grooves, the pitches of arrangement thereof in opening sections of both ends differ and which are disposed collected at every fixed number in the opening section on the side where the pitches of arrangement are narrow, extending over full width in the longitudinal direction in the inner surface of a side plate member. CONSTITUTION:A pair of side plate members 25 are held opposed mutually at regular intervals. A plurality of grooves 21, one ends and the other ends thereof form opening sections, the pitches of arrangement thereof differ in both opening sections and the opening sections thereof on the side where the pitches of arrangement are narrow are disposed collected at every fixed number, are formed extending over full width in the longitudinal direction in the inner surfaces of the side plate members 25. Accordingly, wafers are passed without generating difficulty, the damage of the wafers and the generation of dust with the passing of the wafers are prevented, and the pitches of arrangement of the wafers 3 can be converted collectively and simply. |
