| 摘要 |
PURPOSE:To perform the positional detection of a small hole at a high speed with high accuracy, by detecting the min. value of the intensity of a reflected signal plural times while changing the relative positional relation of an ultrasonic receiving element and an object to be measured. CONSTITUTION:The min. value of the intensity of the reflected signal from objective matter 54, which is obtained by transmitting and receiving ultrasonic waves, is detected by an element 53 while the relative positional relation of an ultrasonic wave transmitting and receiving element 53 and the objective matter 54 is changed and the center position of the matter 54 in an X-axis direction is detected. In addition, the center position thereof in a Y-axis direction is detected from the min. value among the min. values obtained by performing said detection plural times. Therefore, the position of a small diameter hole can be detected at a high speed with high accuracy. |
