发明名称 |
Method for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma |
摘要 |
A method is provided for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma including the steps of generating a non-LTE arc plasma at a pressure greater than about 0.1 atmospheres, introducing a coating material into the arc plasma, positioning a substrate material proximate to the arc plasma whereby activated species of said coating material formed by the arc plasma contact the substrate to form a coating.
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申请公布号 |
US4505947(A) |
申请公布日期 |
1985.03.19 |
申请号 |
US19820398005 |
申请日期 |
1982.07.14 |
申请人 |
THE STANDARD OIL COMPANY (OHIO) |
发明人 |
VUKANOVIC, VLADIMIR;BUTLER, SUSANNAH M.;FAZEKAS, GEORGE;MILLER, JOHN R. |
分类号 |
C23C14/24;C23C14/32;H01L21/205;H01L21/285;H01L31/04;(IPC1-7):B05D1/08 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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