发明名称 Method for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma
摘要 A method is provided for the deposition of coatings upon substrates utilizing a high pressure, non-local thermal equilibrium arc plasma including the steps of generating a non-LTE arc plasma at a pressure greater than about 0.1 atmospheres, introducing a coating material into the arc plasma, positioning a substrate material proximate to the arc plasma whereby activated species of said coating material formed by the arc plasma contact the substrate to form a coating.
申请公布号 US4505947(A) 申请公布日期 1985.03.19
申请号 US19820398005 申请日期 1982.07.14
申请人 THE STANDARD OIL COMPANY (OHIO) 发明人 VUKANOVIC, VLADIMIR;BUTLER, SUSANNAH M.;FAZEKAS, GEORGE;MILLER, JOHN R.
分类号 C23C14/24;C23C14/32;H01L21/205;H01L21/285;H01L31/04;(IPC1-7):B05D1/08 主分类号 C23C14/24
代理机构 代理人
主权项
地址