发明名称 Semiconductor devices for information storage - provided with silicon nitride coating
摘要 <p>Semiconductor devices comprising single or multilayer insulating coating onto which semiconductor clusters or >=1 thin films of Si or Ge are located according to the Parent Patent are provided with a Si3N4 coating on the clusters or thin films. Thus a storage capacity is provided which can control the existance, polarity and amt. of the electric charge caught by the insulating coating.</p>
申请公布号 DE2214305(A1) 申请公布日期 1972.10.05
申请号 DE19722214305 申请日期 1972.03.24
申请人 YAMAZAKI S;TDK ELECTRONICS CO LTD 发明人
分类号 H01L21/8247;G11C11/34;G11C11/40;G11C17/00;H01L21/316;H01L23/29;H01L29/00;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L11/14 主分类号 H01L21/8247
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