| 摘要 |
PURPOSE:To improve the printing quality and production yield along with a longer life of the heat generating resistor by alternately laminating a dielectric member and a resistance member to form a heat generating resistor of a thermal head. CONSTITUTION:Aluminum nitride (AlN)4 as dielectric member and tantalum nitride (Ta2N)5 as resistance member on a substrate 3 in 24 layers in the order of Ta2N, AlN, Ta2N, AlN...to form a heat generating resistor. The film thickness of the heat generating resistor 5 thus formed is preferably 2,000Angstrom , that of aluminum nitride 6-10Angstrom and that of tantalum nitride 10-15Angstrom . In the case, 1- 30Angstrom is enough for the thickness of aluminum nitride. The specific resistance of the resistor thus formed is 20,000muOMEGAcm and proves sufficiently usable in practice. This makes the product short in the shape and eliminates the need for a less film thickness thereby extending the life of the resistor. |
