发明名称 Semiconductor device of polycrystalline silicon resistors
摘要 Provided is a method capable of forming a polycrystalline silicon resistor with preferable ratio accuracy so as to design a resistor circuit with high accuracy. In the method, a length of a low concentration impurity region constituting the polycrystalline silicon resistor in a longitudinal direction is varied in accordance with an occupying area of a metal portion overlapping the low concentration impurity region, thereby correcting a variation in resistance without varying an external shape and the occupying area of the resistor.
申请公布号 US8604589(B2) 申请公布日期 2013.12.10
申请号 US20060494310 申请日期 2006.07.26
申请人 TSUKAMOTO AKIKO;HARADA HIROFUMI;SEIKO INSTRUMENTS INC. 发明人 TSUKAMOTO AKIKO;HARADA HIROFUMI
分类号 H01L21/02 主分类号 H01L21/02
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