| 摘要 |
PURPOSE:To realize heat treatment with excellent thermal efficiency by providing a structure that a buffle clogs almost entire part of aperture of process tube with an effect of elastic material when a support is inserted into the process tube. CONSTITUTION:A buffle 18 is provided to a support 10 and the buffle 18 is provided slidably in the longitudinal direction of support 10. An elastic material 19 is provided between the buffle 18 and block 11 and when the support 10 is inserted into the process tube 14, the buffle 18 clogs the aperture 14a with an effect of the elastic material 19. When the support 10 is drawn, the elastic material 19 does not work on the buffle 18. |
