| 摘要 |
PURPOSE:To shorten substantially time for desorption and adsorption by arranging a needle valve at a pneumatic pressure source side and an air tank at a changeover valve side respectively between the pneumatic pressure source and the changeover valve. CONSTITUTION:The vacuum pocket 11 of an adsorption pad 1 is branched for connection to a pneumatic pressure source 4 and a vacuum source 5 via a solenoid valve and other changeover valves 3 on piping 2. In way of piping 21 between the pneumatic pressure source 4 and the changeover valve 3, a needle valve 6 is provided at the side of the pneumatic pressure source 4 and an air tank 7 at the side of the changeover valve 3, respectively. The capacity of the air tank 7 is set, depending upon the total capacity of the vacuum pocket 11 and the pipings 2 and 21 between the adsorption pad 1 and the air tank 7. Furthermore, the throttle of the needle valve 6 is optionally set to suit the aforesaid total capacity. If a flow rate through the needle valve 6 is throttled in that state, the pressure in the vacuum pocket 11 as desorbed drops, thereby shortening response time for adsorption. |
