摘要 |
<p>PURPOSE:To obtain a humidity sensitive element which is excellent in durability and high in sensitivity for a wide range of humidity by causing a high molecular material used as binder to contain powder of insulating or semiconductive or conductive substance and an amphoteric electrolyte having both acidic group and basic group. CONSTITUTION:As binder, high molecular materials such as polycarbonate, polyethylene terephthalate, etc. are used and a humidity sensitive film 2 impregnated with particles of insulating inorganic compound such as TiO2, SiO2, etc. semiconductive or conductive simple substance such as Be, Ag, etc. or insulating organic high molecular material at the rate of 0.1-90 volume %, particularly 5-70 volume %, and an amphoteric electrolyte such as N-alkyltriglycine of phosphorous lipid C12-18, such as lecithine, etc. is formed on a lower electrode such as Al film, etc. on a glass substrate 1 by coating method. Or, a pair of electrodes 3d, 3c are formed on the substrate 1 and the humidity sensitive film 2 is provided on the electrodes. By this arrangement, a humidity sensitive element of high sensitivity which is excellent in heat resistance and reproducibility can be obtained, since the resistance value and volumetric value of the film 2 vary largely in a range between 10%RH and 100%RH.</p> |