| 摘要 |
A method for identifying characters on a plurality (2) of silicon wafers lying in parallel planes (P0) and aligned with supporting means (1), wherein light reflecting means (5) are inserted from below between first (2a) and second (2b) adjacent wafers among the plurality of wafers; the characters on the first wafer are illuminated by means of a first incident light beam (R1) reflected by the light reflecting means inserted between the first and second adjacent wafers, such that said first incident light beam reflected by a portion of the first wafer parallel to the parallel planes (P0) travels in a direction different from that of an optical observation axis (AO); the illuminated characters on the first wafer are observed along the optical axis, said optical axis being straight and located at least partially underneath the plurality of wafers; and the observed characters are identified.
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