| 摘要 |
PURPOSE:To form a magnetic film efficiently by using a film pressure gage and a resistance meter for measuring the film thickness and the resistance value of the magnetic film formed on a substrate, as well as the resistivity obtained from the measurement, so as to control the magnetic characteristics of the magnetic film. CONSTITUTION:When a target 6 is spattered, a magnetic film is deposited on a quartz oscillator 12 and a resistance detector 14 other than on a disc 8, and the film thickness and the resistance value of the magnetic film formed on the disc 8 are measured therefrom. Output signals of a pressure gage 9, a film thickness gage 11 and a resistance meter 13 are converted into digital signals by an A/D converter 15 and then inputted to a controller 16. These data are processed by the controller 16, and the resistivity of the magnetic film formed on the disc 8 can be determined from said resistance value and the film thickness. The measured value of the resistivity is compared with the reference value thereof and, while the pressure and the film thickness are monitored according to the degree of a deviation, control signals are delivered to a gas flow regulator 17 and a high-frequency power source 4, whereby the partial pressure of oxygen and a discharge power are adjusted. In this way, a magnetic film having desirable magnetic characteristics and films thickness can be obtained. |
