发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To enable to utilize for an electric isolation or an optical isolation by emitting a laser light having dosage of the degree which is equal to or shorter than the absorption end wavelength of a compound semiconductor in the wavelength and does not anneal the surface. CONSTITUTION:A P-N junction 2 is formed, for example, in the vicinity of the surface of a GaP crystalline substrate 1, a photoresist film 3 is covered on the surface of the substrate 1, and holes 4,... of the desired pattern are formed thereat. A pulse laser light 5 of 440nm of wavelength having, for example, 0.6mum of pulse width is emitted to the surface of the substrate 1 through the holes 4, and segregated layers 6,... of phosphorus are formed in the vicinity of the surface of the substrate 1 at this time. Such segregated layers of the P are near insulator and near black in color, the junction 2 is electrically isolated by the layers, and a light generated near the P-N junction is isolated.
申请公布号 JPS59218749(A) 申请公布日期 1984.12.10
申请号 JP19830093725 申请日期 1983.05.26
申请人 SANYO DENKI KK 发明人 ITOU KENSHIYOU;NAKAYAMA TAKEYOSHI;NIINA TATSUHIKO;YONEDA KIYOSHI
分类号 G02B6/12;H01L21/263;H01L21/268;H01L21/76;(IPC1-7):H01L21/76 主分类号 G02B6/12
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