| 摘要 |
PURPOSE:To enable a highly sensitive detection of even fine defect in a ceramic product by using a micro-diameter beam of a soft X-ray for the detection of defects such as bores and cracks of a specific ceramic product such as alumina ceramics. CONSTITUTION:A soft X-ray with the wavelength of 1-300Angstrom and the focus dimensions of less than 1.5mm. is made to irradiate on a ceramics sintered body or an unsintered ceramics molding made of alumina ceramics, silicon ceramics or carbon ceramics or a composite of these ceramics or a composite of the ceramic composite and a metal member. A transmission X-ray image of an object to be inspected is used with a vision camera, a line sensor or the like to facilitate the detection of internal bores, cracks and possible foreign matters in a ceramics made of an element with a small mass absorption coefficient as mentioned above. |
