GROW DISCHARGE DECOMPOSING DEVICE OF MASS PRODUCTION TYPE

摘要

PURPOSE:To improve the quality of amorphous layers by branching distributing pipes for the gaseous mixture to be supplied to plural reaction chambers from a common gas pipe and making equal the length and construction of the respective distributing pipes so that the amt. of the gas to be ejected to the base plates in the respective chambers is made equal. CONSTITUTION:A base plate such as a photosensitive drum 9 or the like and an electrode plate 10 for glow discharge are placed to face each other in a reaction chamber 8. Plural pieces of such chambers 8 are disposed and a gaseous mixture composed of SiH4, etc. is introduced through the 1st piping 18 into the chambers. Gaseous N2O, etc. are introduced through the 2nd conduit 19 into said chambers. The length of gas distributing pipes 14 connected to the gas introducing ports 15 of the chambers 8 is set substantially the same with the distributing part 21 branched from a common gas pipe 20 as a start point and the construction thereof is preferably made the same. The flow rate of the gas led from the part 21 is made equal by such glow discharge decomposing device of a mass production type and the homogeneous amorphous layers are formed on the base plates in the chambers 8.