Substrate carrying in/out device and method of carrying in/out substrate,申请号KR20067016382-传众专利搜索

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发明名称	Substrate carrying in/out device and method of carrying in/out substrate
摘要
申请公布号	KR100828699(B1)	申请公布日期	2008.05.09
申请号	KR20067016382	申请日期	2006.08.14
申请人		发明人
分类号	B65G49/06;B65D85/86;H01L21/68	主分类号	B65G49/06
代理机构		代理人
主权项
地址

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