| 摘要 |
PURPOSE:To obtain an a-Si electrophotographic sensitive body which has a long relaxation time and enough pressure resistance and provides stably a good image by forming a blocking layer between a base plate and a photosensitive layer of a prescribed deposited layer. CONSTITUTION:A p type a-SiCx: H layer 102 doped with B by glow discharge decomposition of a gaseous mixture composed of SiH4, B2H6, CH4 is deposited on an Al drum 101 as a base plate, and in succession, an i type a-Si:H layer 103 doped with B and further an n type A-SiCx:H layer 104 doped with P by glow discharge decomposition of a gaseous mixture composed of SiH4, PH3, CH4 are formed thereon to provide a blocking layer. An i type a-Si:H layer 105 doped with B is deposited thereon by glow discharge of a gaseous mixture composed of SiH4 and CH4 to form a photosensitive layer. An a-SiCx:H layer 106 is formed thereon by glow discharge of a gaseous mixture composed of SiH4 and CH4 to form a protective layer. An electrophotographic sensitive body 107 which has a long relaxation time and enouth pressure resistance and provides stably a good image is thus obtd. |
