发明名称 DRAWING METHOD BY CHARGED PARTICLE BEAM
摘要 PURPOSE:To enable to perform drawing of a trapezoidal pattern with favorable precision by a method wherein the desired trapezoidal pattern to be drawn is divided into two pieces, and the directions of line scanning are reversed mutually when drawing is performed. CONSTITUTION:Data necessary for respectively registers Rs (R1-R7) are set from a computer 1. A data control circuit 16 connects switch circuits 3 as shown with the solid lines to lead respective data into a trapezoidal drawing control circuit 8. A trapezoidal pattern drawn according to data thereof forms a divided left side pattern. After data are led in the circuit 8 thereof, scanning signals for drawing are fed to deflectors 11, 12 from the circuit 8 through D/A converters 9, 10 to draw the pattern. After drawing of the pattern thereof is finished, the circuit 16 changes the circuits 3 over the connecting condition as shown with the dotted lines. The shape of the pedestal drawn according thereto forms a divided right side pattern. Drawing of the trapezoidal types of two pieces thereof is controlled as to make the directions of line scanning in the X direction to be reversed mutually, and moreover respective line scannings are made as to be finished at the connecting parts, and drawing is executed with favorable precision.
申请公布号 JPS59182525(A) 申请公布日期 1984.10.17
申请号 JP19830056552 申请日期 1983.03.31
申请人 NIPPON DENSHI KK 发明人 SATOU HITOSHI;KAWAMURA ICHIROU
分类号 G03F7/20;H01J37/317;H01L21/027 主分类号 G03F7/20
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