| 摘要 |
PURPOSE:To measure center coordinates of a hole to be measured speedily and easily by positioning a measuring element by an origin positioning pin and then inserting it into the hole to be measured. CONSTITUTION:One end surface of the measuring element 10 is fixed to the reverse surface of the lower table 4 of the XY table 2 consisting of a couple of upper and lower tables which are slidable in X and Y directions, and the other end is formed in such a shape that it can be inserted into the hole to be measured. A Z-directional driving source fixed to the upper table 3 is fitted with one terminal of the origin positioning pin 13, and the other terminal is fitted in the tapered hole. Then, displacement sensors 7a and 7b which measure the extents of movement on the X and Y axes while fixed to the table 2 measure the center coordinates of the hole speedily and easily. Further, the measuring element 10 is inserted into the hole once to measure the position shift from a reference position, so the measurement is carried out efficiently. |
